■ Overview
High-purity polyimide molded body, super engineering plastics that maintain excellent properties from low temperature to high temperature.
Heat resistance, oxygen plasma durability, compared to conventional polyimide molded products
Greatly improved outgas characteristics, machinability and water absorption.
Achieves the highest class thermal deformation of 470 degrees among organic materials.
■ Features
Super heat resistance (heat distortion temperature 470 ℃)
Plasma resistance
Low outgas
Low impurity concentration
Low water absorption
■ Main uses
Parts for semiconductor manufacturing equipment
Sliding parts
Worn parts
Insulation parts
Heat resistant parts