High precision laser processing equipment

■ Overview

We have realized the development of a high-precision laser processing device that supports positioning accuracy from several micrometer to several hundred nm with full closed loop control equipped with a linear scale. The wavelength of the oscillator can be selected, and it is possible to provide laser processing equipment suitable for the application.


■ Features

High-precision processing (small spot size (10 μm or less), constant focal light) is possible
Wide ability to respond to samples
Supports high-precision machining with fully closed loop control
Can also be automated
Compatible with CO2 laser to excimer laser (193 / 248nm)
Selection of nanosecond laser to ultrashort pulse laser is also possible


■ Specifications

Oscillator: Selectable from CO2 laser (10.6 μm) to excimer laser (248 nm / 193 nm)
Optical system: Selectable (scanner system or condenser lens, etc.)
Processing size: Up to 500 x 600 mm (larger sizes are also available)
Control method: NC control
Power supply: 200V


■ Main uses

Semiconductor / LCD / Organic EL related
Electronic components related
Automobile parts
Solar cell / secondary battery related
Medical related